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SEMI E140:2022

Current

Current

The latest, up-to-date edition.

Guide to Calculate Cost of Ownership (COO) Metrics for Gas Delivery Systems

Available format(s)

Hardcopy

Language(s)

English

Published date

01-10-2022

€134.60
Excluding VAT

DocumentType
Guide
Pages
0
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current
Supersedes

SEMI E10:2022 Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization
SEMI E35 : 2018 Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment

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