SEMI E142 : 2020
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
Specification for Substrate Mapping
Available format(s)
Hardcopy
Superseded date
07-08-2020
Superseded by
Language(s)
English
Published date
01-08-2020
Important note : Users cannot be edited or removed once added to your Multi user PDF.This Document defines the data items that are required to report, store and transmit map data for substrates such as wafers, frames, strips and trays.
| DocumentType |
Standard
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy |
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