SEMI E142:2022
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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Specification for Substrate Mapping
Available format(s)
Hardcopy
Superseded date
11-03-2024
Superseded by
Language(s)
English
Published date
01-10-2022
Important note : Users cannot be edited or removed once added to your Multi user PDF.This Specification defines the data items that are required to report, store, and transmit map data for substrates such as wafers, frames, strips, and trays.
| DocumentType |
Revision
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy | |
| Supersedes |
| SEMI E5:2022 | Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II) |
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