SEMI E142:2022
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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Specification for Substrate Mapping
Available format(s)
Hardcopy
Superseded date
11-03-2024
Language(s)
English
Published date
01-10-2022
This Specification defines the data items that are required to report, store, and transmit map data for substrates such as wafers, frames, strips, and trays.
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