SEMI E142:2024
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
Specification for Substrate Mapping
Available format(s)
Hardcopy
Language(s)
English
Published date
01-02-2024
Superseded date
25-03-2025
Superseded by
€295.83
Excluding VAT
This Specification defines the data items that are required to report, store, and transmit map data for substrates such as Wafers, Frames, Strips, and Trays.
| DocumentType |
Standard
|
| Pages |
0
|
| ProductNote |
The editorial version of this standard is now available from Feb-2024
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy | |
| Supersedes |
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