SEMI E142:2024
Current
Current
The latest, up-to-date edition.
Specification for Substrate Mapping
Available format(s)
Hardcopy
Language(s)
English
Published date
01-02-2024
Important note : Users cannot be edited or removed once added to your Multi user PDF.This Specification defines the data items that are required to report, store, and transmit map data for substrates such as Wafers, Frames, Strips, and Trays.
| DocumentType |
Standard
|
| Pages |
0
|
| ProductNote |
The editorial version of this standard is now available from Feb-2024
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| Supersedes |
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