Name: SEMI E142:2024
Brand: SEMI
Price: 331.23 EUR
Availability: InStock

Specification for Substrate Mapping

Available format(s)

Hardcopy

Language(s)

English

Published date

01-02-2024

Publisher

Semiconductor Equipment & Materials Institute

This Specification defines the data items that are required to report, store, and transmit map data for substrates such as Wafers, Frames, Strips, and Trays.

DocumentType	Standard
Pages	0
ProductNote	The editorial version of this standard is now available from Feb-2024
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current
Supersedes	SEMI E142:2022

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SEMI E142:2024

Specification for Substrate Mapping

Abstract

General Product Information

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