SEMI E153 : 2010(R2017)
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR AMHS SEM (AMHS SEM)
Published date
12-01-2013
Sets up a Specific Equipment Model (SEM) for AMHS (AMHS SEM). The model consists of equipment characteristics and behaviors that are to be implemented in addition to the SEMI E30 fundamental requirements and selected additional capabilities.
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