SEMI E163 : 2012(R2017)
Current
Current
The latest, up-to-date edition.
GUIDE FOR THE HANDLING OF RETICLES AND OTHER EXTREMELY ELECTROSTATIC SENSITIVE (EES) ITEMS WITHIN SPECIALLY DESIGNATED AREAS
Published date
12-01-2013
Pertains to minimize the negative impact on productivity caused by static charge and electric fields in semiconductor manufacturing equipment and facilities.
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