SEMI E163 : 2012(R2017)
Current
Current
The latest, up-to-date edition.
GUIDE FOR THE HANDLING OF RETICLES AND OTHER EXTREMELY ELECTROSTATIC SENSITIVE (EES) ITEMS WITHIN SPECIALLY DESIGNATED AREAS
Published date
12-01-2013
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Pertains to minimize the negative impact on productivity caused by static charge and electric fields in semiconductor manufacturing equipment and facilities.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (03/2012)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| SEMI E78 : 2012 | GUIDE TO ASSESS AND CONTROL ELECTROSTATIC DISCHARGE (ESD) AND ELECTROSTATIC ATTRACTION (ESA) FOR EQUIPMENT |
| SEMI E43 : 2013 | RECOMMENDED PRACTICE FOR ELETROSTATIC MEASUREMENTS ON OBJECTS AND SURFACES |
| SEMI E129 : 2012 | GUIDE TO ASSESS AND CONTROL ELECTROSTATIC CHARGE IN A SEMICONDUCTOR MANUFACTURING FACILITY |
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