SEMI E164 : 2014(R2021)
Current
Current
The latest, up-to-date edition.
Specification for EDA Common Metadata
Available format(s)
Hardcopy
Language(s)
English
Published date
01-07-2021
Important note : Users cannot be edited or removed once added to your Multi user PDF.The purpose of this Specification is to promote commonality among implementations by defining common representations and conventions of equipment metadata based on SEMIE125 Specification for Equipment Self-Description.
| DocumentType |
Standard
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| Pages |
0
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| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
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| Supersedes |
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