SEMI E164 : 2014(R2021)
Current
Current
The latest, up-to-date edition.
Specification for EDA Common Metadata
Available format(s)
Hardcopy
Language(s)
English
Published date
01-07-2021
€125.00
Excluding VAT
The purpose of this Specification is to promote commonality among implementations by defining common representations and conventions of equipment metadata based on SEMIE125 Specification for Equipment Self-Description.
| DocumentType |
Standard
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| Supersedes |
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