SEMI E170:2019
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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Specification for Secured Foundation Of Recipe Management System (SFORMS)
Hardcopy
English
01-04-2019
05-10-2020
The purpose of this Standard is to provide a standardized ‘secure, safe and efficient recipe operation mechanism between Recipe Management System (RMS) and equipment’ which is used as a foundation of RMS for semiconductor manufacturing systems or similar ones.
| DocumentType |
Standard
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy | |
| Supersedes |
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