SEMI E170:2019
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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Specification for Secured Foundation Of Recipe Management System (SFORMS)
Hardcopy
05-10-2020
English
01-04-2019
The purpose of this Standard is to provide a standardized ‘secure, safe and efficient recipe operation mechanism between Recipe Management System (RMS) and equipment’ which is used as a foundation of RMS for semiconductor manufacturing systems or similar ones.
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