SEMI E170 : 2020
Current
Current
The latest, up-to-date edition.
Specification for Secured Foundation Of Recipe Management System (SFORMS)
Available format(s)
Hardcopy
Language(s)
English
Published date
01-05-2020
€125.00
Excluding VAT
The purpose of this Standard is to provide a standardized ‘secure, safe and efficient recipe operation mechanism between Recipe Management System (RMS) and equipment’ which is used as a foundation of RMS for semiconductor manufacturing systems or similar ones.
| DocumentType |
Standard
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| Supersedes |
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