SEMI E172 : 2020
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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Specification for SECS Equipment Data Dictionary (SEDD)
Available format(s)
Hardcopy
Superseded date
17-11-2023
Language(s)
English
Published date
01-03-2020
The purpose of this Specification is to define the format and content of a dataset that describes key elements of the SECS-II interface for any production equipment.
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