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SEMI E172 : 2020

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

View Superseded by

Specification for SECS Equipment Data Dictionary (SEDD)

Available format(s)

Hardcopy

Superseded date

17-11-2023

Superseded by

SEMI E172:2023

Language(s)

English

Published date

01-03-2020

€134.60
Excluding VAT

The purpose of this Specification is to define the format and content of a dataset that describes key elements of the SECS-II interface for any production equipment.

DocumentType
Standard
Pages
0
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy
Supersedes

SEMI E30:2023 Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)

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