SEMI E172 : 2020
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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Specification for SECS Equipment Data Dictionary (SEDD)
Hardcopy
17-11-2023
English
01-03-2020
The purpose of this Specification is to define the format and content of a dataset that describes key elements of the SECS-II interface for any production equipment.
DocumentType |
Standard
|
Pages |
0
|
PublisherName |
Semiconductor Equipment & Materials Institute
|
Status |
Superseded
|
SupersededBy | |
Supersedes |
SEMI E30:2023 | Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM) |
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