SEMI E172:2023
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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Specification for SECS Equipment Data Dictionary (SEDD)
Available format(s)
Hardcopy
Language(s)
English
Published date
01-10-2023
Superseded date
24-03-2025
Superseded by
€141.67
Excluding VAT
The purpose of this Specification is to define the format and content of a dataset that describes key elements of the SECS-II interface for any production equipment.
| DocumentType |
Standard
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy | |
| Supersedes |
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