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SEMI E172:2023

Current

Current

The latest, up-to-date edition.

Specification for SECS Equipment Data Dictionary (SEDD)

Available format(s)

Hardcopy

Language(s)

English

Published date

01-10-2023

€152.54
Excluding VAT

The purpose of this Specification is to define the format and content of a dataset that describes key elements of the SECS-II interface for any production equipment.

DocumentType
Standard
Pages
0
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current
Supersedes

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