SEMI E173:2021
Current
Current
The latest, up-to-date edition.
Specification for XML SECS-II Message Notation (SMN)
Available format(s)
Hardcopy
Language(s)
English
Published date
01-07-2021
The content of SECS-II messages are defined in SEMI E5, SEMI Equipment Communication Standards 2 Message Content (SECS-II).
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