SEMI E176 : 2017
Current
Current
The latest, up-to-date edition.
GUIDE TO ASSESS AND MINIMIZE ELECTROMAGNETIC INTERFERENCE (EMI) IN A SEMICONDUCTOR MANUFACTURING ENVIRONMENT
Published date
07-11-2017
Gives guidance for the assessment and minimization of electromagnetic interference (EMI) in a semiconductor manufacturing environment to improve yield, equipment availability, and test results (e.g., testing time, measurement relevance, repeatability, and accuracy).
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