SEMI E28 : 2018
Current
Current
The latest, up-to-date edition.
GUIDE FOR PRESSURE SPECIFICATIONS OF THE MASS FLOW CONTROLLER
Published date
12-01-2013
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Sets up a uniform, worldwide means to describe pressure parameters as they relate to mass flow controllers (MFC).
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| SEMI E12 : 2013 | GUIDE FOR STANDARDIZED PRESSURE, TEMPERATURE, DENSITY, AND FLOW UNITS USED IN MASS FLOW METERS AND MASS FLOW CONTROLLERS |
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