![header thumbnail](/images/publishers\semi_cover.gif)
SEMI E30:2020
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
![header thumbnail](/images/publishers\semi_cover.gif)
Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)
Available format(s)
Hardcopy
Superseded date
19-05-2023
Language(s)
English
Published date
01-05-2020
GEM defines a standard implementation of SECS-II for all semiconductor manufacturing equipment.
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.