SEMI E30:2020
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)
Available format(s)
Hardcopy
Superseded date
19-05-2023
Superseded by
Language(s)
English
Published date
01-05-2020
Important note : Users cannot be edited or removed once added to your Multi user PDF.GEM defines a standard implementation of SECS-II for all semiconductor manufacturing equipment.
| DocumentType |
Standard
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy | |
| Supersedes |
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