SEMI E30:2023
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)
Available format(s)
Hardcopy
Language(s)
English
Published date
01-04-2023
Superseded date
11-03-2024
Superseded by
€279.17
Excluding VAT
This Specification defines a standard implementation framework of SECS-II messages for basic semiconductor manufacturing equipment.
| DocumentType |
Standard
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy | |
| Supersedes |
| SEMI E30.1:2017(R2023) | Specification for Inspection and Review Specific Equipment Model (ISEM) |
| SEMI E84:2023 | Specification for Enhanced Carrier Handoff Parallel I/O Interface |
| SEMI E88:2023 | Specification for AMHS Storage SEM (Stocker SEM) |
| SEMI E109:2017(R2023) | Specification for Reticle and Pod Management (RPMS) |
| SEMI E116:2023 | Specification for Equipment Performance Tracking |
| SEMI E87:2023 | Specification for Carrier Management (CMS) |
| SEMI E126:2008(R2023) | Specification for Equipment Quality Information Parameters (EQIP) |
| SEMI E122:2017(R2023) | Specification for Tester Equipment Specific Equipment Model (TSEM) |
| SEMI E82:2006(R2023) | Specification for Interbay/Intrabay AMHS SEM (IBSEM) |
| SEMI E5:2023 | Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II) |
| SEMI E172 : 2020 | Specification for SECS Equipment Data Dictionary (SEDD) |
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