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SEMI E30:2023

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

View Superseded by

Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)

Available format(s)

Hardcopy

Superseded date

11-03-2024

Superseded by

SEMI E30:2024

Language(s)

English

Published date

01-04-2023

€300.60
Excluding VAT

This Specification defines a standard implementation framework of SECS-II messages for basic semiconductor manufacturing equipment.

DocumentType
Standard
Pages
0
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy
Supersedes

SEMI E30.1:2017(R2023) Specification for Inspection and Review Specific Equipment Model (ISEM)
SEMI E84:2023 Specification for Enhanced Carrier Handoff Parallel I/O Interface
SEMI E88:2023 Specification for AMHS Storage SEM (Stocker SEM)
SEMI E109:2017(R2023) Specification for Reticle and Pod Management (RPMS)
SEMI E116:2023 Specification for Equipment Performance Tracking
SEMI E87:2023 Specification for Carrier Management (CMS)
SEMI E126:2008(R2023) Specification for Equipment Quality Information Parameters (EQIP)
SEMI E122:2017(R2023) Specification for Tester Equipment Specific Equipment Model (TSEM)
SEMI E82:2006(R2023) Specification for Interbay/Intrabay AMHS SEM (IBSEM)

SEMI E5:2023 Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E172 : 2020 Specification for SECS Equipment Data Dictionary (SEDD)

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