Name: SEMI E30:2023
Brand: SEMI
Price: 312.56 EUR
Availability: InStock

Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)

Available format(s)

Hardcopy

Superseded date

11-03-2024

Language(s)

English

Published date

01-04-2023

Publisher

Semiconductor Equipment & Materials Institute

This Specification defines a standard implementation framework of SECS-II messages for basic semiconductor manufacturing equipment.

DocumentType	Standard
Pages	0
PublisherName	Semiconductor Equipment & Materials Institute
Status	Superseded
SupersededBy	SEMI E30:2024
Supersedes	SEMI E30:2020

SEMI E30.1:2017(R2023)	Specification for Inspection and Review Specific Equipment Model (ISEM)
SEMI E84:2023	Specification for Enhanced Carrier Handoff Parallel I/O Interface
SEMI E88:2023	Specification for AMHS Storage SEM (Stocker SEM)
SEMI E109:2017(R2023)	Specification for Reticle and Pod Management (RPMS)
SEMI E116:2023	Specification for Equipment Performance Tracking
SEMI E87:2023	Specification for Carrier Management (CMS)
SEMI E126:2008(R2023)	Specification for Equipment Quality Information Parameters (EQIP)
SEMI E122:2017(R2023)	Specification for Tester Equipment Specific Equipment Model (TSEM)
SEMI E82:2006(R2023)	Specification for Interbay/Intrabay AMHS SEM (IBSEM)

SEMI E5:2023	Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E172 : 2020	Specification for SECS Equipment Data Dictionary (SEDD)

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SEMI E30:2023