SEMI E35 : 2018
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment
Available format(s)
Hardcopy
Superseded date
07-11-2022
Superseded by
Language(s)
English
Published date
16-07-2018
Important note : Users cannot be edited or removed once added to your Multi user PDF.| DocumentType |
Standard
|
| ISBN |
0
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy | |
| Supersedes |
| SEMI E140:2022 | Guide to Calculate Cost of Ownership (COO) Metrics for Gas Delivery Systems |
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