SEMI E35:2022
Current
Current
The latest, up-to-date edition.
Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment
Published date
01-10-2022
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The purpose of this Guide is to provide standard cost of ownership (COO) metrics for evaluating unit production cost effectiveness of manufacturing equipment in the semiconductor and related industries.
| DocumentType |
Guide
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| Supersedes |
| SEMI E10 : 2021 | SEMI E10 - Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization |
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