SEMI E36 : 2004
Current
The latest, up-to-date edition.
SEMICONDUCTOR EQUIPMENT MANUFACTURING INFORMATION TAGGING SPECIFICATION
12-01-2013
Aims to create an information interchange specification, not an authoring specification or an electronic presentation specification. Semiconductor Equipment Manufacturing Information Tagging will define the markup necessary for exchanging documents electronically, for facilitating retrieval of information content, and for validating information interchanges.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001) Includes SEMI E36.1. INACTIVE - Not currently supported by the technical committee. (03/2017)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| SEMI E149 : 2014 | GUIDE FOR EQUIPMENT SUPPLIER-PROVIDED DOCUMENTATION FOR THE ACQUISITION AND USE OF MANUFACTURING EQUIPMENT |
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