SEMI E37.2 : 1995(R2003)
Withdrawn
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
HIGH-SPEED SECS MESSAGE SERVICES GENERAL SESSION (HSMS-GS)
Withdrawn date
01-11-2009
Published date
12-01-2013
Sorry this product is not available in your region.
Intended to support the needs of complex systems containing multiple independently accessible subsystems such as cluster tools or track systems.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (08/2005)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Withdrawn
|
| SEMI E38 : 1996 | CLUSTER TOOL MODULE COMMUNICATIONS (CTMC) |
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.