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SEMI E38 : 1996

SEMI E38 : 1996

Withdrawn

Withdrawn

A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.

CLUSTER TOOL MODULE COMMUNICATIONS (CTMC)

Withdrawn date

01-03-2007

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Describes the communications with and among modules within a cluster tool for automated control. Services defined here will enable standard interoperability of modules from independent suppliers.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Withdrawn

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