SEMI E38 : 1996
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
CLUSTER TOOL MODULE COMMUNICATIONS (CTMC)
01-03-2007
12-01-2013
Describes the communications with and among modules within a cluster tool for automated control. Services defined here will enable standard interoperability of modules from independent suppliers.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Withdrawn
|
| SEMI E58 : JUL 2003 | AUTOMATED RELIABILITY, AVAILABILITY, AND MAINTAINABILITY STANDARD (ARAMS): CONCEPTS, BEHAVIOR, AND SERVICES |
| SEMI E53.1 : 2004 | SECS-2 SUPPORT FOR EVENT REPORTING STANDARD |
| SEMI E37 : 2013 | HIGH-SPEED SECS MESSAGE SERVICES (HSMS) GENERIC SERVICES |
| SEMI E37.2 : 1995(R2003) | HIGH-SPEED SECS MESSAGE SERVICES GENERAL SESSION (HSMS-GS) |
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.