SEMI E40.1 : 2013
Current
Current
The latest, up-to-date edition.
SECS-2 SUPPORT FOR PROCESSING MANAGEMENT STANDARD
Published date
12-01-2013
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Maps the services and data of SEMI E40 to SECS-II streams and functions and data definitions. And implements the Processing Management, which provides remote control of wafer processing, using the SECS-II message protocol.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (11/2001) Not available separately, Published within the SEMI E40 family of standards. (02/2009)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| SEMI E174 : 2017 | SPECIFICATION FOR WAFER JOB MANAGEMENT (WJM) |
| SEMI E40 : 2013 | STANDARD FOR PROCESSING MANAGEMENT |
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