SEMI E43 : 2013
Current
Current
The latest, up-to-date edition.
RECOMMENDED PRACTICE FOR ELETROSTATIC MEASUREMENTS ON OBJECTS AND SURFACES
Published date
12-01-2013
Gives guidance for reproducible electrostatic measurements on any surface or object, consistent with the scope and limitations set forth below.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
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| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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