SEMI E49.4 : 1998
Current
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The latest, up-to-date edition.
GUIDE FOR HIGH PURITY SOLVENT DISTRIBUTION SYSTEMS IN SEMICONDUCTOR MANUFACTURING EQUIPMENT
Published date
12-01-2013
Describes guidelines for high purity (HP) solvent distribution systems in semiconductor production equipment. The distribution systems consist of stainless steel (SS) piping designed to supply flammable solvents only.
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