SEMI E49.5 : 2004
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GUIDE FOR ULTRAHIGH PURITY SOLVENT DISTRIBUTION SYSTEMS IN SEMICONDUCTOR MANUFACTURING EQUIPMENT
Published date
12-01-2013
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Describes guidelines for ultrahigh purity (UHP) solvent distribution systems in semiconductor production equipment. The distribution systems consist of stainless steel (SS) piping designed to supply flammable solvents only. Typical tools include photolithography track equipment, solvent wet stations, and isopropyl alcohol vapor dryers.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (10/2004) Not available separately, Published within the SEMI E49 family of standards. (02/2009)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| SEMI E70 : 2013 | GUIDE FOR TOOL ACCOMMODATION PROCESS |
| SEMI E49 : 2017 | GUIDE FOR HIGH PURITY AND ULTRAHIGH PURITY PIPING PERFORMANCE, SUBASSEMBLIES, AND FINAL ASSEMBLIES |
| SEMI E49.7 : 2004E | PURITY GUIDE FOR THE DESIGN AND MANUFACTURE OF ULTRAPURE WATER AND LIQUID CHEMICAL SYSTEMS IN SEMICONDUCTOR PROCESS EQUIPMENT |
| SEMI E49 : 2017 | GUIDE FOR HIGH PURITY AND ULTRAHIGH PURITY PIPING PERFORMANCE, SUBASSEMBLIES, AND FINAL ASSEMBLIES |
| SEMI F81 : 2011(R2017) | SPECIFICATION FOR VISUAL INSPECTION AND ACCEPTANCE OF GAS TUNGSTEN ARC (GTA) WELDS IN FLUID DISTRIBUTION SYSTEMS IN SEMICONDUCTOR MANUFACTURING APPLICATIONS |
| SEMI F32 : 2011 | TEST METHOD FOR DETERMINING OF FLOW COEFFICIENT FOR HIGH PURITY SHUTOFF VALVES |
| SEMI F73 : 2014 | TEST METHOD FOR SCANNING ELECTRON MICROSCOPY (SEM) EVALUATION OF WETTED SURFACE CONDITION OF STAINLESS STEEL COMPONENTS |
| SEMI F1 : 2012 | SPECIFICATION FOR LEAK INTEGRITY OF HIGH-PURITY GAS PIPING SYSTEMS AND COMPONENTS |
| SEMI F78 : 2011(R2017) | PRACTICE FOR GAS TUNGSTEN ARC (GTA) WELDING OF FLUID DISTRIBUTION SYSTEMS IN SEMICONDUCTOR MANUFACTURING APPLICATIONS |
| SEMI F19 : 2015 | SPECIFICATION FOR THE SURFACE CONDITION OF THE WETTED SURFACES OF STAINLESS STEEL COMPONENTS |
| SEMI F60 : 2014 | TEST METHOD FOR ESCA EVALUATION OF SURFACE COMPOSITION OF WETTED SURFACES OF PASSIVATED 316L STAINLESS STEEL COMPONENTS |
| SEMI F20 : 2006E(R2017) | SPECIFICATION FOR 316L STAINLESS STEEL BAR, FORGINGS, EXTRUDED SHAPES, PLATE, AND TUBING FOR COMPONENTS USED IN GENERAL PURPOSE, HIGH PURITY AND ULTRA-HIGH PURITY SEMICONDUCTOR MANUFACTURING APPLICATIONS |
| SEMI E49.6 : 2003(R2011) | GUIDE FOR SUBSYSTEM ASSEMBLY AND TESTING PROCEDURES - STAINLESS STEEL SYSTEMS |
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