SEMI E5:2021
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)
Available format(s)
Hardcopy
Language(s)
English
Published date
01-08-2021
Superseded date
07-07-2022
Superseded by
€250.00
Excluding VAT
This Standard, otherwise known as the Specification for SECS-II messages, works with the Protocol Layer to define how messages are communicated between equipment and host.
| DocumentType |
Standard
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy | |
| Supersedes |
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