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SEMI E5:2021

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

View Superseded by

Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)

Available format(s)

Hardcopy

Superseded date

07-07-2022

Superseded by

SEMI E5:2022

Language(s)

English

Published date

01-08-2021

€269.20
Excluding VAT

This Standard, otherwise known as the Specification for SECS-II messages, works with the Protocol Layer to define how messages are communicated between equipment and host.

DocumentType
Standard
Pages
0
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy
Supersedes

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