SEMI E5:2021
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)
Hardcopy
07-07-2022
English
01-08-2021
This Standard, otherwise known as the Specification for SECS-II messages, works with the Protocol Layer to define how messages are communicated between equipment and host.
DocumentType |
Standard
|
Pages |
0
|
PublisherName |
Semiconductor Equipment & Materials Institute
|
Status |
Superseded
|
SupersededBy | |
Supersedes |
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