SEMI E5:2022
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)
Available format(s)
Hardcopy
Superseded date
05-04-2023
Language(s)
English
Published date
01-06-2022
This Standard, otherwise known as the Specification for SECS-II messages, works with the Protocol Layer to define how messages are communicated between equipment and host.
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