SEMI E5:2024
Current
Current
The latest, up-to-date edition.
Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)
Available format(s)
Hardcopy
Language(s)
English
Published date
01-02-2024
€295.83
Excluding VAT
This Standard, otherwise known as the Specification for SECS-II messages, works with the Protocol Layer to define how messages are communicated between equipment and host.
| DocumentType |
Standard
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| Supersedes |
| SEMI E145:2014(R2024) | Classification for Measurement Unit Symbols in XML |
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