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SEMI E5:2024

Current

Current

The latest, up-to-date edition.

Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)

Available format(s)

Hardcopy

Language(s)

English

Published date

01-02-2024

€318.55
Excluding VAT

This Standard, otherwise known as the Specification for SECS-II messages, works with the Protocol Layer to define how messages are communicated between equipment and host.

DocumentType
Standard
Pages
0
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current
Supersedes

SEMI E145:2014(R2024) Classification for Measurement Unit Symbols in XML

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