• SEMI E51 : 2000

    Current The latest, up-to-date edition.

    GUIDE FOR TYPICAL FACILITIES SERVICES AND TERMINATION MATRIX

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    Published date:  12-01-2013

    Publisher:  Semiconductor Equipment & Materials Institute

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    Abstract - (Show below) - (Hide below)

    The aim is to give a cost-effective and timely tool installation with minimum impact on the existing customer services, systems or facilities to insure that the quality of facilities supplied (eg chemical, gases, water) is not compromised once internal to the tool. It provides the equipment supplier with an understanding of the facilities available at the POC point of connection at the "typical" customer site. This document does not include site-specific conditions. When site specifications differ the user should create a site-specific matrix that is submitted with the request for a quote. Each tool should be supplied in a "facility ready" state. This document gives the range of conditions in which equipment should be capable of operating.

    General Product Information - (Show below) - (Hide below)

    Development Note Not available for sale from ILI, customer to contact SEMI. (05/2001)
    Document Type Standard
    Publisher Semiconductor Equipment & Materials Institute
    Status Current

    Standards Referenced By This Book - (Show below) - (Hide below)

    SEMI E70 : 2013 GUIDE FOR TOOL ACCOMMODATION PROCESS
    SEMI F49 : 2000(R2013) GUIDE FOR SEMICONDUCTOR FACTORY SYSTEMS VOLTAGE SAG IMMUNITY
    SEMI F47 : 2006(R2012) SPECIFICATION FOR SEMICONDUCTOR PROCESSING EQUIPMENT VOLTAGE SAG IMMUNITY

    Standards Referencing This Book - (Show below) - (Hide below)

    SEMI E7 : 1991(R2004) SPECIFICATION FOR ELECTRICAL INTERFACES FOR THE U.S. ONLY
    SEMI F47 : 2006(R2012) SPECIFICATION FOR SEMICONDUCTOR PROCESSING EQUIPMENT VOLTAGE SAG IMMUNITY
    SEMI E49 : 2017 GUIDE FOR HIGH PURITY AND ULTRAHIGH PURITY PIPING PERFORMANCE, SUBASSEMBLIES, AND FINAL ASSEMBLIES
    SEMI E6 : 2014 GUIDE FOR SEMICONDUCTOR EQUIPMENT INSTALLATION DOCUMENTATION
    SEMI E33 : 2017 GUIDE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT ELECTROMAGNETIC COMPATIBILITY (EMC)
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