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SEMI E7 : 1991(R2004)

SEMI E7 : 1991(R2004)

Withdrawn

Withdrawn

A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.

SPECIFICATION FOR ELECTRICAL INTERFACES FOR THE U.S. ONLY

Withdrawn date

01-03-2012

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

The objective is to simplify implementation and design of future semiconductor facilities where both equipment users and suppliers can be assured of the required electrical interfaces.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Withdrawn

SEMI E51 : 2000 GUIDE FOR TYPICAL FACILITIES SERVICES AND TERMINATION MATRIX

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