SEMI E54.20 : 2016
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR SENSOR/ACTUATOR NETWORK COMMUNICATIONS FOR ETHERCAT
Published date
12-01-2013
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Defines a SAN communications standard based on the EtherCAT specification that is in compliance with SEMI E54.1.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (10/2007) No longer published within the SEMI E54 family of standards. Published and sold separately on its own page. (02/2009)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| SEMI E54.1 : 2016 | SPECIFICATION FOR SENSOR/ACTUATOR NETWORK COMMON DEVICE MODEL |
| SEMI E39 : 2003(R2014) | OBJECT SERVICES STANDARD: CONCEPTS, BEHAVIOUR, AND SERVICES |
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