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SEMI E54.20 : 2016

SEMI E54.20 : 2016

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR SENSOR/ACTUATOR NETWORK COMMUNICATIONS FOR ETHERCAT

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Defines a SAN communications standard based on the EtherCAT specification that is in compliance with SEMI E54.1.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (10/2007) No longer published within the SEMI E54 family of standards. Published and sold separately on its own page. (02/2009)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI E54.1 : 2016 SPECIFICATION FOR SENSOR/ACTUATOR NETWORK COMMON DEVICE MODEL
SEMI E39 : 2003(R2014) OBJECT SERVICES STANDARD: CONCEPTS, BEHAVIOUR, AND SERVICES

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