SEMI E54.22 : 2014
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
SPECIFICATION FOR SENSOR/ACTUATOR NETWORK SPECIFIC DEVICE MODEL FOR VACUUM PRESSURE GAUGES
Superseded date
05-10-2020
Superseded by
Published date
28-07-2013
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Defines a network-independent application model comprised of device objects which are common to all Vacuum Pressure Gauges on a semiconductor equipment Sensor/Actuator communications network.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (07/2013)
|
| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
|
| SupersededBy |
| SEMI E54.1 : 2016 | SPECIFICATION FOR SENSOR/ACTUATOR NETWORK COMMON DEVICE MODEL |
| SEMI E39 : 2003(R2014) | OBJECT SERVICES STANDARD: CONCEPTS, BEHAVIOUR, AND SERVICES |
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