SEMI E54.24 : 2016
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR SENSOR/ACTUATOR NETWORK SPECIFIC DEVICE MODEL OF A GENERIC EQUIPMENT NETWORKED SENSOR (GENSEN)
Published date
06-12-2016
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Defines a specific device structure and behavior of a generic equipment networked sensor.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (11/2016)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI E54.1 : 2016 | SPECIFICATION FOR SENSOR/ACTUATOR NETWORK COMMON DEVICE MODEL |
| SEMI E54 : 2016 | SPECIFICATION FOR SENSOR/ACTUATOR NETWORK |
| SEMI E90 : 2012(R2018) | SPECIFICATION FOR SUBSTRATE TRACKING |
| SEMI E39 : 2003(R2014) | OBJECT SERVICES STANDARD: CONCEPTS, BEHAVIOUR, AND SERVICES |
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