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SEMI E54.24 : 2016

SEMI E54.24 : 2016

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR SENSOR/ACTUATOR NETWORK SPECIFIC DEVICE MODEL OF A GENERIC EQUIPMENT NETWORKED SENSOR (GENSEN)

Published date

06-12-2016

Publisher

Semiconductor Equipment & Materials Institute

Defines a specific device structure and behavior of a generic equipment networked sensor.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (11/2016)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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