SEMI E54.6 : 1997
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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STANDARD FOR SENSOR/ACTUATOR NETWORK COMMUNICATIONS FOR LONWORKS
01-07-2005
12-01-2013
Describes a communication specification based on the LonWorks technology specification to enable communications between intelligent devices on a sensor/actuator network (SAN) that operate according to SEMI specified device models (common and device specific) in a semiconductor manufacturing tool.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (07/2005)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
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| SupersededBy |
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