SEMI E56 : 2017
Current
Current
The latest, up-to-date edition.
TEST METHOD FOR DETERMINING ACCURACY, LINEARITY, REPEATABILITY, SHORT-TERM REPRODUCIBILITY, HYSTERESIS, AND DEADBAND OF THERMAL MASS FLOW CONTROLLERS
Published date
12-01-2013
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Specifies a standardized method to quantify the accuracy, linearity, repeatability, short-term reproducibility, hysteresis, and dead band of a thermal mass flow controller (MFC).
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI F113 : 2016 | TEST METHOD FOR PRESSURE TRANSDUCERS USED IN GAS DELIVERY SYSTEMS |
| SEMI PV81 : 2018 | GUIDE FOR SPECIFYING LOW PRESSURE HORIZONTAL DIFFUSION FURNACE |
| ASME MFC 21.1 : 1900 | MEASUREMENT OF GAS FLOW BY MEANS OF CAPILLARY TUBE THERMAL MASS FLOWMETERS AND MASS FLOW CONTROLLERS |
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