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SEMI E63:2023

Current

Current

The latest, up-to-date edition.

Specification for 300 mm Box Opener/Loader to Tool Standard (BOLTS-M) Interface

Available format(s)

Hardcopy

Language(s)

English

Published date

01-01-2023

€152.54
Excluding VAT

This Standard specifies the tool side of the mechanical interface between the main part of a process or metrology tool and the component that opens boxes and presents the boxes to the tool wafer handler for unloading and loading 300 mm wafers.

DocumentType
Standard
Pages
0
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current
Supersedes

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