SEMI E63:2023
Current
Current
The latest, up-to-date edition.
Specification for 300 mm Box Opener/Loader to Tool Standard (BOLTS-M) Interface
Available format(s)
Hardcopy
Language(s)
English
Published date
01-01-2023
This Standard specifies the tool side of the mechanical interface between the main part of a process or metrology tool and the component that opens boxes and presents the boxes to the tool wafer handler for unloading and loading 300 mm wafers.
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