SEMI E69 : 1998(R2013)
Current
Current
The latest, up-to-date edition.
TEST METHOD FOR DETERMINING REPRODUCIBILITY AND ZERO DRIFT FOR THERMAL MASS FLOW CONTROLLERS
Published date
12-01-2013
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Gives a standardized method to quantify the reproducibility and zero drift of a thermal mass flow controller (MFC).
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001) Also available in CD-ROM. (02/2009)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI E67 : 2011(R2018) | TEST METHOD FOR DETERMINING RELIABILITY OF MASS FLOW CONTROLLER |
| SEMI PV81 : 2018 | GUIDE FOR SPECIFYING LOW PRESSURE HORIZONTAL DIFFUSION FURNACE |
| ASME MFC 21.1 : 1900 | MEASUREMENT OF GAS FLOW BY MEANS OF CAPILLARY TUBE THERMAL MASS FLOWMETERS AND MASS FLOW CONTROLLERS |
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