SEMI E73 : 2001(R2007)
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR VACUUM PUMP INTERFACES - DRY PUMPS
Published date
12-01-2013
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Specifies the physical and electrical interfaces for dry pump (DRP) type vacuum pumps. Standardization of pump interfaces will allow for interchangeability of pumps. Device manufacturers use this standard when procuring processing equipment to specify to the equipment supplier the interface required for interchangeability of pumps.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001) Also available in CD-ROM. (02/2007)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI E6 : 2014 | GUIDE FOR SEMICONDUCTOR EQUIPMENT INSTALLATION DOCUMENTATION |
| SEMI S2 : 2016B | ENVIRONMENTAL, HEALTH, AND SAFETY GUIDELINE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT |
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