SEMI E74 : 2001(R2007)
Current
The latest, up-to-date edition.
SPECIFICATION FOR VACUUM PUMP INTERFACES - TURBOMOLECULAR PUMPS
12-01-2013
Specifies the physical and electrical interfaces for turbo molecular pump (TMP) type vacuum pumps. Standardization of pump interfaces will allow for interchangeability of pumps. Device manufacturers use this standard when procuring processing equipment to specify to the equipment supplier the interface required for interchangeability of pumps.
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