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SEMI E77:2023

Current

Current

The latest, up-to-date edition.

Test Method for Calculation of Conversion Factors for a Mass Flow Controller Using Surrogate Gases

Available format(s)

Hardcopy

Language(s)

English

Published date

01-04-2023

€152.54
Excluding VAT

The purpose of this Test Method is to quantify a nominal average conversion factor from one gas to another for a mass flow controller (MFC) and to quantify the conversion factor as function of flow for an MFC

DocumentType
Test Method
Pages
0
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current
Supersedes

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