SEMI E77:2023
Current
Current
The latest, up-to-date edition.
Test Method for Calculation of Conversion Factors for a Mass Flow Controller Using Surrogate Gases
Available format(s)
Hardcopy
Language(s)
English
Published date
01-04-2023
Important note : Users cannot be edited or removed once added to your Multi user PDF.The purpose of this Test Method is to quantify a nominal average conversion factor from one gas to another for a mass flow controller (MFC) and to quantify the conversion factor as function of flow for an MFC
| DocumentType |
Test Method
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| Supersedes |
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