SEMI E77:2023
Current
Current
The latest, up-to-date edition.
Test Method for Calculation of Conversion Factors for a Mass Flow Controller Using Surrogate Gases
Available format(s)
Hardcopy
Language(s)
English
Published date
01-04-2023
The purpose of this Test Method is to quantify a nominal average conversion factor from one gas to another for a mass flow controller (MFC) and to quantify the conversion factor as function of flow for an MFC
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