SEMI E78 : 2012
Current
Current
The latest, up-to-date edition.
GUIDE TO ASSESS AND CONTROL ELECTROSTATIC DISCHARGE (ESD) AND ELECTROSTATIC ATTRACTION (ESA) FOR EQUIPMENT
Published date
12-01-2013
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Provides guidelines for establishing electrostatic compatibility of equipment used in semiconductor manufacturing.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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