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SEMI E79 : 2014E

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

View Superseded by

SPECIFICATION FOR DEFINITION AND MEASUREMENT OF EQUIPMENT PRODUCTIVITY

Superseded date

08-03-2021

Superseded by

SEMI E79:2021

Published date

12-01-2013

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Specifies metrics and calculations for measurement of equipment productivity, including overall equipment efficiency (OEE).

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

SEMI E116 : 2017 SPECIFICATION FOR EQUIPMENT PERFORMANCE TRACKING
SEMI E10 : 2014E SPECIFICATION FOR DEFINITION AND MEASUREMENT OF EQUIPMENT RELIABILITY, AVAILABILITY, AND MAINTAINABILITY (RAM) AND UTILIZATION
SEMI E124 : 2007(R2013) GUIDE FOR DEFINITION AND CALCULATION OF OVERALL FACTORY EFFICIENCY (OFE) AND OTHER ASSOCIATED FACTORY-LEVEL PRODUCTIVITY METRICS
SEMI E150 : 2014 GUIDE FOR EQUIPMENT TRAINING BEST PRACTICES

SEMI E10 : 2014E SPECIFICATION FOR DEFINITION AND MEASUREMENT OF EQUIPMENT RELIABILITY, AVAILABILITY, AND MAINTAINABILITY (RAM) AND UTILIZATION
SEMI E116 : 2017 SPECIFICATION FOR EQUIPMENT PERFORMANCE TRACKING
SEMI E35 : 2012 GUIDE TO CALCULATE COST OF OWNERSHIP (COO) METRICS FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT
SEMI E58 : JUL 2003 AUTOMATED RELIABILITY, AVAILABILITY, AND MAINTAINABILITY STANDARD (ARAMS): CONCEPTS, BEHAVIOR, AND SERVICES

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