SEMI E79 : 2014E
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
SPECIFICATION FOR DEFINITION AND MEASUREMENT OF EQUIPMENT PRODUCTIVITY
Superseded date
08-03-2021
Published date
12-01-2013
Specifies metrics and calculations for measurement of equipment productivity, including overall equipment efficiency (OEE).
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