SEMI E87:2023
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
Specification for Carrier Management (CMS)
Hardcopy
05-04-2024
English
01-10-2023
Important note : Users cannot be edited or removed once added to your Multi user PDF.This Specification provides a standardized behavior for host view communication with production equipment during the coordination, execution, and completion of automated and manual carrier transfers to and from the equipment and, if it exists, its internal buffer space.
| DocumentType |
Standard
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy | |
| Supersedes |
| SEMI E94 : 2014 | SPECIFICATION FOR CONTROL JOB MANAGEMENTT |
| SEMI E30:2023 | Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM) |
| SEMI E40 : 2018 | Specification for Processing Management |
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