SEMI E87:2024-05
Current
Current
The latest, up-to-date edition.
Specification for Carrier Management (CMS)
Available format(s)
Hardcopy
Language(s)
English
Published date
01-05-2024
Important note : Users cannot be edited or removed once added to your Multi user PDF.This Specification provides a standardized behavior for host view communication with production equipment during the coordination, execution, and completion of automated and manual carrier transfers to and from the equipment and, if it exists, its internal buffer space.
| DocumentType |
Standard
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| Supersedes |
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