SEMI E87:2024-05
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
Specification for Carrier Management (CMS)
Hardcopy
English
01-05-2024
24-03-2025
This Specification provides a standardized behavior for host view communication with production equipment during the coordination, execution, and completion of automated and manual carrier transfers to and from the equipment and, if it exists, its internal buffer space.
| DocumentType |
Standard
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy | |
| Supersedes |
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