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SEMI E90.1 : 2011

SEMI E90.1 : 2011

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR SECS-2 PROTOCOL SUBSTRATE TRACKING

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Maps the services and data of SEMI E90 to SECS-II streams and functions, and data definitions.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001) Not available separately, Published within the SEMI E90 family of standards. (02/2009)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI E127.1 : 2008 SPECIFICATION FOR SECS-2 PROTOCOL FOR INTEGRATED MEASUREMENT MODULE COMMUNICATIONS (IMMC)

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