SEMI E90.1 : 2011
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR SECS-2 PROTOCOL SUBSTRATE TRACKING
Published date
12-01-2013
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Maps the services and data of SEMI E90 to SECS-II streams and functions, and data definitions.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001) Not available separately, Published within the SEMI E90 family of standards. (02/2009)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| SEMI E127.1 : 2008 | SPECIFICATION FOR SECS-2 PROTOCOL FOR INTEGRATED MEASUREMENT MODULE COMMUNICATIONS (IMMC) |
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